MICRO-MATERIAL HANDLING EMPLOYING E-BEAM GENERATED TOPOGRAPHIES OF COPPER AND ALUMINIUM

Authors

  • S. Matope Department of Industrial Engineering, Stellenbosch University
  • A.F. van der Merwe Department of Industrial Engineering, Stellenbosch University
  • R. Nemutudi Department of Material Science, iThemba Labs
  • M. Nkosi Department of Material Science, iThemba Labs
  • M. Maaza Department of Material Science, iThemba Labs

DOI:

https://doi.org/10.7166/22-2-24

Keywords:

copper, aluminium, micro-material handling system, Van der Waals forces, Electron beam (e-beam) evaporator, silicon substrate, Rumpf-Rabinovich?s rms formula

Abstract

ENGLISH ABSTRACT: This paper focuses on the employment of copper and aluminium in a micro-material handling system actuated by Van der Waals forces. Electron beam (e-beam) evaporator deposited both materials on a silicon substrate at a rate of 0.6-1.2 Angstroms/second, vacuum pressure between 2x10-6 and 3x10-6mbar, and at a current less than 10mA. A Veeco NanoMan V Atomic Force Microscope with Nanoscope version 7.3 software was used to analyse the root mean square (rms) surface roughnesses of the generated topographies. Rumpf-Rabinovich

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Published

2011-11-05

How to Cite

Matope, S., van der Merwe, A., Nemutudi, R., Nkosi, M., & Maaza, M. (2011). MICRO-MATERIAL HANDLING EMPLOYING E-BEAM GENERATED TOPOGRAPHIES OF COPPER AND ALUMINIUM. The South African Journal of Industrial Engineering, 22(2). https://doi.org/10.7166/22-2-24

Issue

Vol. 22 No. 2 (2011)

Section

General Articles

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