MICRO-MATERIAL HANDLING, EMPLOYING E-BEAM COATINGS OF COPPER AND SILVER
DOI:
https://doi.org/10.7166/23-1-223Keywords:
Van der Waals forces, adhesive forces, micro-material handling, e-beam coatings of copper and silver on siliconAbstract
ENGLISH ABSTRACT: Van der Waals forces and other adhesive forces impose great challenges on micro-material handling. Mechanical grippers fail to release micro-parts reliably because of them. This paper explores how the problematic Van der Waals forces may be used for micro-material handling purposes using surface roughnesses generated by e-beam coatings of copper and silver on silicon. An atomic force microscope, model Asylum MFP 3 D-Bio with version 6.22A software, was used to measure the forces exerted by the surfaces. A silver coating of 1.41 nm rms surface roughness value is found to exert the highest Van der Waals force, followed by a copper coating of 2.72 nm rms; a copper coating of 217 nm rms exerts the least force. This implies that, in a reliable micro-material handling system, these coatings are suitable for the interactive surfaces of the placement position, micro-gripper, and the pick-up position respectively.
AFRIKAANSE OPSOMMING: Van der Waalskragte en ander bindingskragte hou steeds groot uitdagings in vir mikromateriaalhantering. As gevolg van hierdie bindingskragte stel meganiese gryptoerusting nie die mikro-partikels vry nie. Hierdie artikel ondersoek hoe die Van der Waalskragte gebruik kan word vir die mikro-materiaalhanteringsproses deur die gebruik van oppervlakgrofheid gegenereer deur
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