MICRO-MATERIAL HANDLING, EMPLOYING E-BEAM COATINGS OF COPPER AND SILVER

S. Matope, A.F. Van der Merwe, Y.I. Rabinovich

Abstract


ENGLISH ABSTRACT: Van der Waals forces and other adhesive forces impose great challenges on micro-material handling. Mechanical grippers fail to release micro-parts reliably because of them. This paper explores how the problematic Van der Waals forces may be used for micro-material handling purposes using surface roughnesses generated by e-beam coatings of copper and silver on silicon. An atomic force microscope, model Asylum MFP 3 D-Bio with version 6.22A software, was used to measure the forces exerted by the surfaces. A silver coating of 1.41 nm rms surface roughness value is found to exert the highest Van der Waals force, followed by a copper coating of 2.72 nm rms; a copper coating of 217 nm rms exerts the least force. This implies that, in a reliable micro-material handling system, these coatings are suitable for the interactive surfaces of the placement position, micro-gripper, and the pick-up position respectively.

AFRIKAANSE OPSOMMING: Van der Waalskragte en ander bindingskragte hou steeds groot uitdagings in vir mikromateriaalhantering. As gevolg van hierdie bindingskragte stel meganiese gryptoerusting nie die mikro-partikels vry nie. Hierdie artikel ondersoek hoe die Van der Waalskragte gebruik kan word vir die mikro-materiaalhanteringsproses deur die gebruik van oppervlakgrofheid gegenereer deur n e-straal-laagbedekking van koper en silwer op silikon. n Atoomkrag mikroskoop, model Asylum MFP 3 D-Bio met weergawe 6.22A programmatuur, is gebruik om die kragte deur die oppervlakke uitgeoefen te meet. Daar is gevind dat n silwer laagbedekking met n oppervlakgrofheid van 1.41nm wortel-gemiddelde-kwadraat (wgk) die hoogste Van der Waalskrag uitoefen, gevolg deur n koper laagbedekking met n oppervlakgrofheid van 2.72nm wgk; n koper laagbedekking met n grofheid van 217nm wgk het die kleinste krag uitgeoefen. Dit impliseer dat, vir n betroubare mikro-materiaalhanteringsisteem, hierdie laagbedekkings geskik is vir die interaktiewe oppervlakke van die plasingsposisie, die mikro-gryper en die optelposisie.


Keywords


Van der Waals forces; adhesive forces; micro-material handling; e-beam coatings of copper and silver on silicon

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DOI: https://doi.org/10.7166/23-1-223

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